Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-To-Order-Matching Process

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Christian Flechsig; Jacob Lohmer; Rainer Lasch; Benjamin Zettler; Germar Schneider; Dietrich Eberts

Journal title: Transactions on Semiconductor Manufacturing

Journal number: 3

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2022

DOI identifier: 10.1109/TSM.2022.3184041

ISSN:0894-6507