SMT2020—A Semiconductor Manufacturing Testbed

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Authors: Denny Kopp, Michael Hassoun, Adar Kalir, Lars Monch

Journal title: IEEE Transactions on Semiconductor Manufacturing

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2020

Published pages: 1-1

DOI identifier: 10.1109/tsm.2020.3001933

ISSN:0894-6507