Investigation of Predictive Maintenance for Semiconductor Manufacturing and its Impacts on the Supply Chain

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Authors: Daniel Fischer, Patrick Moder, Hans Ehm

Journal title: 2021 22nd IEEE International Conference on Industrial Technology (ICIT)

Journal publisher: IEEE

Published year: 2021

Published pages: 1409-1416

DOI identifier: 10.1109/icit46573.2021.9453481

ISBN:978-1-7281-5730-6