Novel challenges for root cause investigation in semiconductor manufacturing

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Authors: Pleschberger, Martin; Zernig, Anja; Kaestner, Andre

Journal title: 19th European Advanced Process Control and Manufacturing Conference (apc/m)

Journal number: 3

Journal publisher: European Advanced Process Control and manufacturing Conference

Published year: 2019

DOI identifier: 10.5281/zenodo.3247340

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