A New High-Volume/Low-Mix Simulation Testbed for Semiconductor Manufacturing

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Authors: Michael Hassoun, Denny Kopp, Lars Monch, Adar Kalir

Journal title: 2019 Winter Simulation Conference (WSC)

Journal publisher: IEEE

Published year: 2019

Published pages: 2419-2428

DOI identifier: 10.1109/wsc40007.2019.9004654

ISBN:978-1-7281-3283-9