Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication

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Authors: Martin Schellenberger, Sabrina Anger, Markus Pfeffer, Volker Häublein, Georg Roeder, Anton Bauer

Journal title: Digital Transformation in Semiconductor Manufacturing

Journal publisher: Springer

Published year: 2020