Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing

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Authors: Paolo Badalà, Emanuele Smecca, Simone Rascunà, Corrado Bongiorno, Egidio Carria, Anna Bassi, Gabriele Bellocchi, Cristina Tringali, Antonino La Magna and Alessandra Alberti

Journal title: 13th European Conference on Silicon Carbide and Related materials ECSCRM 2021

Journal publisher: ECSCRM

Published year: 2021