TXRF/GIXRF high precision laboratory setup with high flux monochromatic source

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Authors: Claudia G. Fatuzzo, Philipp Hönicke, Claudia Caliri, Roberta Ricciari, Daniele Pagano, Andreas G. Karydas, Patrizia Vasquez, Francesco Paolo Romano

Journal title: 6th PTB Seminar - VUV and EUV Metrology

Journal publisher: PTB

Published year: 2021