Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

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Authors: Hönicke, Philipp; Andrle, Anna; Kayser, Yves; Nikolaev, Konstantin V.; Probst, Jürgen; Scholze, Frank; Soltwisch, Victor; Weimann, Thomas; Beckhoff, Burkhard

Journal title: Nanotechnology

Journal number: 31

Journal publisher: Institute of Physics Publishing

Published year: 2020

Published pages: 505709

DOI identifier: 10.1088/1361-6528/abb557

ISSN: 0957-4484