Multiscale simulations of plasma etching in silicon carbide structures

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Authors: M.Italia, I.Deretzis, S.Scalese, A.La Magna, M.Pirnaci, D.Pagano, D.Tenaglia, P.Vasquez

Journal title: 13th European Conference on Silicon Carbide and Related materials ECSCRM 2021

Journal publisher: ECSCRM

Published year: 2021