Resonating AlN-thin film MEMS mirror with digital control

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Authors: Konsta Ruotsalainen, Dmitry Morits, Oili M. E. Ylivaara, Jukka Kyynarainen

Journal title: Journal of Optical Microsystems

Journal publisher: SPIE

Published year: 2022

DOI identifier: 10.1117/1.jom.2.1.011006

ISSN: 2708-5260

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