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Authors: Jacopo Frascaroli (1), Marta Tonini (1), Selene Colombo (1), Luisito Livellara (1), Luca Mariani (1), Paolo Targa (1), Roberto Fumagalli (1), Viktor Samu (2), Máté Nagy (2), Gábor Molnár (2), Áron Horváth (2), Zoltán Bartal (2), Zoltán Kiss (2),Tamás Sipőcz (2), Isabella Mica (1). (1) STMicroelectronics, Agrate Brianza, Italy (2) Semilab Semiconductor Physics Laboratory Company Ltd., B
Journal title: IEEE Transactions on Semiconductor Manufacturing
Journal number: Volume: 35, Issue: 3, August 2022
Journal publisher: Institute of Electrical and Electronics Engineers
Published year: 2022
Published pages: 540 - 545
DOI identifier: 10.1109/tsm.2022.3189847
ISSN: 0894-6507
- Not specified