A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

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Authors: Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Michel Juge

Journal title: IEEE 17th International Conference on Automation Science and Engineering (CASE)

Journal publisher: IEEE

Published year: 2021

DOI identifier: 10.1109/case49439.2021.9551541