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Authors: A. Fernández Herrero, F. Scholze, G. Dai, V. Soltwisch
Journal title: Nanomanufacturing and Metrology
Journal number: 2520811X
Journal publisher: Springer
Published year: 2022
Published pages: 149–158
DOI identifier: 10.1007/s41871-022-00126-w
ISSN: 2520-811X
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