1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Philip Tchatchoua, Guillaume Graton, Mustapha Ouladsine, Julien Muller, Abraham Traore, Michel Juge

Journal title: International Conference on Control, Automation and Diagnosis (ICCAD)

Journal publisher: IEEE

Published year: 2022

DOI identifier: 10.1109/iccad55197.2022.9853997