Block copolymer line roughness measurement via PSD: application to fingerprint samples

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Authors: Aurélie Le Pennec, Jérôme Rêche, Patrick Quéméré, Guido Rademaker, Romain Jarnias, Charlotte Bouet, Célia Nicolet, Christophe Navarro, Maxime Argoud, Raluca Tiron

Journal publisher: SPIE

Published year: 2020

DOI identifier: 10.1117/12.2551854