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Authors: Maria Gabriela Gusmão Cacho, Khatia Benotmane, Patricia Pimenta-Barros, Charlotte Bouet, Guido Rademaker, Maxime Argoud, Christophe Navarro, Raluca Tiron, and Nicolas Possémé
Journal title: Journal of Vacuum Science & Technology B
Journal publisher: AIP
Published year: 2021
DOI identifier: 10.1116/6.0001102
ISSN: 2166-2746
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