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Hardware for 2PP-based manufacturing with new autofocus system

Summary
An autofocus module was successfully integrated and operated in the two-photon polymerisation setup. It sends a probe beam through the objective onto the sample and detects the reflected light on the inverse path. The wavelength of the probe laser was chosen in a way that is does neither affect the photopolymer nor interfere with the sample illuminations. The integration requires a fine tuned adjustment of objective, camera, laser divergence and autofocus to match them all. It was found that a data acquisition approach with sample scanning before production provides valuable support in substrate defect detection and process automation.
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