Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It

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Authors: Matthieu Weber; Nils Boysen; Octavio Graniel; Abderrahime Sekkat; Christian Dussarrat; Paulo Wiff; Anjana Devi; David Muñoz-Rojas

Journal title: ACS MATERIALS AU

Journal publisher: ACS Publications

Published year: 2023

DOI identifier: 10.24406/publica-1375

ISSN: 2694-2461