Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS

Summary

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Artem Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel

Journal title: Materials Today Communications

Journal publisher: Elsevier BV

Published year: 2022

ISSN: 2352-4928

Structured mapping
Unfold all
/
Fold all
CORDA