Periodic Reporting for period 2 - CITCOM (A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components)

The term micro-electro-mechanical systems (MEMS) was traditionally used for micro-fabricated devices that converted electrical signals in movement (micro-actuators) or movement into electronic signals. The last category represents currently the bulk of the MEMS devices (e.g...