Periodic Reporting for period 2 - CITCOM (A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components)

Summary
The term micro-electro-mechanical systems (MEMS) was traditionally used for micro-fabricated devices that converted electrical signals in movement (micro-actuators) or movement into electronic signals. The last category represents currently the bulk of the MEMS devices (e.g...
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Web resources: https://cordis.europa.eu/project/id/768883/reporting
https://citcom.eu/
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A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components
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