Laser Induced Periodic Surface Structuring(LIPSS)is a powerful toolfor creating sub-micrometric features on large surfaces in an up-scalable and industrial way. In order to control the process and reach a sufficient uniformity for some applications a careful attention must be paid to the control of the laser beam parameters likeits polarization, stability and shape. A uniform beam shape is mandatory in some cases. Although some demonstrationsof beam shapingwithhigh power handlingoptical components have been made, there is not much reported regarding the use of SLM(Spatial Light Modulator)for beam shaping of ultrashort pulses. In the current work we show the possibility to use SLM with different type oflaser sources, including a femtosecond system deliver-ingup to 1 mJ per pulses.
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