High performance DLC-based mold technology with high control over micro and nano features for optics and microfluidics.

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Authors: Daniela Angione (ADAMA)

Journal title: Lecture at 18th International Conference on Nanoimprint and Nanoprint Technologies (NNT) 2019.

Journal number: 14-16 October 2019

Journal publisher: NNT 2019

Published year: 2019