Laser drilling with a top-hat beam of micro-scale high aspect ratio holes in silicon nitride

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Authors: Vahid Nasrollahi, Pavel Penchev, Afif Batal, Hoang Le, Stefan Dimov, Kyunghan Kim

Journal title: Journal of Materials Processing Technology

Journal number: 281

Journal publisher: Elsevier BV

Published year: 2020

Published pages: 116636

DOI identifier: 10.1016/j.jmatprotec.2020.116636

ISSN:0924-0136