Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes

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Authors: Vahid Nasrollahi, Pavel Penchev, Stefan Dimov, Lars Korner, Richard Leach, Kyunghan Kim

Journal title: Journal of Micro and Nano-Manufacturing

Journal number: 5/4

Journal publisher: ASME

Published year: 2017

DOI identifier: 10.1115/1.4037645

ISSN:2166-0468