Drilling of micron-scale high aspect ratio holes with ultra-short pulsed lasers: Critical effects of focusing lenses and fluence on the resulting holes’ morphology

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Authors: Vahid Nasrollahi, Pavel Penchev, Tahseen Jwad, Stefan Dimov, Kyunghan Kim, Changmin Im

Journal title: Optics and Lasers in Engineering

Journal number: 110

Journal publisher: Elsevier BV

Published year: 2018

Published pages: 315-322

DOI identifier: 10.1016/j.optlaseng.2018.04.024

ISSN:0143-8166