Zero Defect Manufacturing of Microsemiconductors – An Application of Machine Learning and Artificial Intelligence

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Authors: Zhengwen Huang, Veerendra C Angadi, Morad Danishvar, Ali Mousavi, Maozhen Li

Journal title: 2018 5th International Conference on Systems and Informatics (ICSAI)

Journal publisher: IEEE

Published year: 2018

Published pages: 449-454

DOI identifier: 10.1109/icsai.2018.8599292

ISBN:978-1-7281-0120-0