Towards Robust Visual Wafer Cleaning Anomaly Detection

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Authors: Romana Boiger, Gerfried Millner, Manfred Mücke, Bernat Zaragoza Travieso

Journal title: Proceedings of the 18th European Advanced Process Control and Manufacturing Conference (apc/m)

Journal publisher: 18th European Advanced Process Control and Manufacturing Conference (apc/m)

Published year: 2018