Feature Extraction From Analog Wafermaps: A Comparison of Classical Image Processing and a Deep Generative Model

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Authors: Tiago Santos, Stefan Schrunner, Bernhard C. Geiger, Olivia Pfeiler, Anja Zernig, Andre Kaestner, Roman Kern

Journal title: IEEE Transactions on Semiconductor Manufacturing

Journal number: 32/2

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2019

Published pages: 190-198

DOI identifier: 10.1109/tsm.2019.2911061

ISSN: 0894-6507