Sub-micron structuring/texturing of diamond-like carbon-coated replication masters with a femtosecond laser

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Authors: Aleksandra Michalek, Shaojun Qi, Afif Batal, Pavel Penchev, Hanshan Dong, Tian Long See, Stefan Dimov

Journal title: Applied Physics A

Journal number: 126/2

Journal publisher: Springer Verlag

Published year: 2020

DOI identifier: 10.1007/s00339-020-3303-4

ISSN:0947-8396

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