An Outline of a Complementary Inspection System for Micro-Electro-Mechanical System (MEMS) Devices Based on Radiography and Plenoptic Camera

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Authors: Alvin CHONG, Guojin FENG, Jamil KANFOUD and Tat-Hean GAN

Journal title: Advances in Transdisciplinary Engineering

Journal number: Volume 8: Advances in Manufacturing Technology XXXII

Journal publisher: IOS Press

Published year: 2018

Published pages: 33 - 38

DOI identifier: 10.3233/978-1-61499-902-7-33

ISSN:2352-751X