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Authors: Marton Nemeth, Zsolt Kohari, Janos Hegedus, Gusztav Hantos, Laszlo Pohl, Peter Palovics, Andras Poppe
Journal title: 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)
Journal publisher: IEEE
Published year: 2019
Published pages: 1-6
DOI identifier: 10.1109/dtip.2019.8752937
ISBN:978-1-7281-3286-0