OPTIMAL | Automated Maskless Laser Lithography Platform for First Time Right Mixed Scale Patterning

Summary

Laser-based technologies for creating structures in the range from nanometer up to millimeter size find many applications such as free form optics, photonics, multifunctional surfaces, lab-on-chip, etc. with a global market volume of > 200 billion euros. The original structures know as masters are the first step in the making of tools for key-enabling technologies like injection molding or nanoimprinting. Some of the current limitations in the laser lithography processes are the limited depth of the structures, small area and low speed at process level, high-power consumption in the laser interference lithography, and multiple and expensive processes required for the development of hierarchical multifunctional structures at industrial level.

The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with

  1. high depth (150 micrometer)
  2. dimensions in the range from 100 nm to sub-mm in XYZ,
  3. 2D&3D shape on flat surface,
  4. combining parallel & serial patterning,
  5. no need for external treatments on samples;
  6. increased speed (1 cm2/min) and large area (up to 2000 cm2),
  7. > 40% of reduction in the consumption of resources for the whole manufacturing process.

 

The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will reduce the energy consumption, avoid material waste, decrease costs, and lead time in many applications. The platform will potentiate the possibilities in the sustainable making of high quality, versatile, less costly masters for industrial manufacturing, as demonstrated in 4 use cases (optical lenses, multifunctional riblet structures, virtual reality lens, microfluidic chips).

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Demonstrators, pilots, prototypes
Demonstrator (project outcome type)
Industrial pilot or use case
Comment:

The OPTIMAL platform will be validated through the manufacturing of master tools for four different use cases: a) full-polymer micro lenses for industrial optics, b) hierarchical multifunctional drag reduction riblet structures for aviation, c) free-form lens arrays for high-end virtual reality displays and d) microfluidic hierarchical structures for lab on chip medical devices.

Exploitable result(s)
Key exploitable technology-approach
Result items:
More information & hyperlinks
Web resources: https://cordis.europa.eu/project/id/101057029
https://www.optimal-project.eu/
Start date: 01-10-2022
End date: 30-09-2026
Total budget - Public funding: 5 616 876,00 Euro - 5 616 875,00 Euro
Cordis data

Original description

Laser-based technologies for creating structures in the range from nanometer up to millimeter size find many applications such as free form optics, photonics, multifunctional surfaces, lab-on-chip, etc. with a global market volume of > 200 billion euros. The original structures know as masters are the first step in the making of tools for key-enabling technologies like injection molding or nanoimprinting. Some of the current limitations in the laser lithography processes are the limited depth of the structures, small area and low speed at process level, high-power consumption in the laser interference lithography, and multiple and expensive processes required for the development of hierarchical multifunctional structures at industrial level.
The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with (i) high depth (150 micrometer), ii) dimensions in the range from 100 nm to sub-mm in XYZ, iii) 2D&3D shape on flat surface, (iv) combining parallel & serial patterning, (v) no need for external treatments on samples; vi) increased speed (1 cm2/min) and large area (up to 2000 cm2), vii) > 40% of reduction in the consumption of resources for the whole manufacturing process. The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.
By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will reduce the energy consumption, avoid material waste, decrease costs, and lead time in many applications. The platform will potentiate the possibilities in the sustainable making of high quality, versatile, less costly masters for industrial manufacturing, as demonstrated in 4 use cases (optical lenses, multifunctional riblet structures, virtual reality lens, microfluidic chips).

Status

SIGNED

Call topic

HORIZON-CL4-2021-TWIN-TRANSITION-01-03

Update Date

27-10-2022
Geographical location(s)
Structured mapping
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Factories of the Future Partnership - Made in Europe Partnership

Made in Europe (MiE)
HORIZON-CL4-2021-TWIN-TRANSITION-01
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)
Knowledge-sharing and networking activity (Conference, event, workshop)
Demonstrator (project outcome type)
Industrial pilot or use case
Comment:

The OPTIMAL platform will be validated through the manufacturing of master tools for four different use cases: a) full-polymer micro lenses for industrial optics, b) hierarchical multifunctional drag reduction riblet structures for aviation, c) free-form lens arrays for high-end virtual reality displays and d) microfluidic hierarchical structures for lab on chip medical devices.

Key exploitable technology-approach
Result items:
Video
Presentation
Report
Publication
Open Research Data Pilot
Standards
Autonomous Smart Factories Pathway
Collaborative Product-Service Factories Pathway
Result items:
Product, no Service
Service-enabled Product Design
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Service orient. Product Design (integration of PLM and CRM)
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Product-Service Innovation
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Service Innovation and new Business Models
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Product-Service Symbiotic Evolution
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Circular Economy Pathway
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Energy Efficiency Pathway
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Limited Visibility of Energy Performance
Limited Metering (Facility Level) - Spreadsheet based Reporting
No Impact Assessment in Place (Energy Efficiency)
Process Level Energy Performance Monitoring
Result items:
Structured Data Collection (for Energy Efficiency)
Sub Metering and IoT Sensors (Energy Profiling at Process Level)
Ad-hoc Process Level Impact Assessment (Energy Efficiency)
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Energy Performance Insights
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Energy Efficiency Informed Decision Making
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Application of Energy Efficiency Key Performance Indicators (KPIs)
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Online Continuous Energy Management
Economic sustainability
Result items:

The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with high depth, dimensions in the range from 100 nm to sub-mm, 2D&3D shape on flat surface, combining parallel & serial patterning, no need for external treatments on samples, increased speed and large area. 

Product quality - Quality assurance
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OEE (Q) - Quality
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First Pass Yield (FPY)
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Lead time
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Flexibility
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Productivity
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Production speed - OEE (P)
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Environmental sustainability
Result items:

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will allow for “first time right” fabrication of the required structures, lower consumption of resources, waste reduction, lower CO2 emissions, increase of productivity, and cost reduction. 

Material efficiency
Result items:
Waste minimisation
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Circular economy
Reducing emissions in manufacturing processes
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Reducing the consumption of energy
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Overarching Manufacturing Performance KPIs
Overal Equipment Effectiveness (OEE)
Production speed - OEE (P)
Result items:
OEE (Q) - Quality
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Information and communication technologies
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Data collection, storage, analytics, processing and AI
Result items:
Data processing
Data acquisition
Data analytics
Predictive analytics
Data modelling
Data storage
Relational databases
Cognitive and artificial intelligence (AI) technologies - machine learning
Result items:
Programming Languages
Advanced material processing technologies
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Flexible Sheet-to-Sheet (S2S) and Roll-to-Roll (R2R)
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Photonics-based materials processing technologies
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Replication, Equipment for flexible scalable prod/Assembly , Coatings
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Innovative physical, chemical and physicochemical processes
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Advanced materials in manufacturing systems
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Smart and functional materials
Engineering tools
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Knowledge-workers and operators
Interoperability (ICT)
Result items:
Industrial Reference ICT Architectures
Reference Architectural Model Industrie 4.0 (RAMI 4.0)
RAMI 4.0 Hierarchy Axis
Control device
Result items:
Work station
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Work centres - Production lines
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Enterprise - Factory
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Connected Enterprises - Factories
Manufacturing the products of the future
Customised products
Novel materials
Complex structures, geometries and scale
Resource efficient, sustainable products
Regulatory compliance
Result items:
Contract types
Regulatory framework associated to digitalisation
Data ownership - data governance
Result items:
Added value - impact - value proposition
Result items:

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will allow for “first time right” fabrication of the required structures, lower consumption of resources, waste reduction, lower CO2 emissions, increase of productivity, and cost reduction. 

Data ownership - data governance
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Software development and ownership model
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Proprietary software
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Business models
Business ecosystems
Service model
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Infrastructure as a Service (IaaS)
Result items:
Platform as a Service (PaaS)
Result items:
Product-as-a-Service (PaaS)
Revenue model (earning logics)
Infrastructure ownership
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Manufacturing system levels
Result items:
Control device
Result items:
Work station
Result items:
Enterprise - Factory
Result items:
Connected Enterprises - Factories
Work centres - Production lines
Result items:
MiE KPI section - Resources
Knowledge-sharing and networking activity (Conference, event, workshop)
Cooperation with other initiatives & partnerships
MiE KPI section - Outcomes
MiE_25-27_RP01: Sustainable value network resilience and competitiveness through robust and flexible production technologies
Result items:

The OPTIMAL approach involves various disciplines, which interact with each other in order to achieve the project objectives. Material research and photochemistry is needed to develop the suitable photoresists (MRT). Laser technology knowledge (JOR, ISE) is required for developing novel laser lithography methods, machines, and processes. The electronics finds its application in the optical based sensors for in-line monitoring, controlling the laser sources and patterning (ILC, DPX). The software engineering expertise (UPR) completes the required skills for the development of self-learning algorithms for generating the virtual photomasks. Mechanical and environmental engineering deal with the equipment and manufacturing processes and their life cycle assessment (JOR). Experts in training and communication science (ILC, UPR) will design workshops and training materials to explain and promote the developed technologies to broad public and stakeholders. 

MiE_25-27_RP02: Excellent productive and flexible Manufacturing automation for open strategic autonomy
Result items:

The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with high depth, dimensions in the range from 100 nm to sub-mm, 2D&3D shape on flat surface, combining parallel & serial patterning, no need for external treatments on samples, increased speed and large area. The OPTIMAL consortium consists of three research institutes (JOR, ISE, ILC), one university (UPR), member of the Italian Photonics Association, three Small Medium Enterprises (MRT, DPX, HYP), two big industries, leaders in their corresponding market (SDA and BCD).

MiE_25-27_RP03: Recovering and preserving the European leadership in strategic and high value added products
Result items:

The OPTIMAL platform will be validated through the manufacturing of master tools for four different use cases: a) full-polymer micro lenses for industrial optics, b) hierarchical multifunctional drag reduction riblet structures for aviation, c) free-form lens arrays for high-end virtual reality displays and d) microfluidic hierarchical structures for lab on chip medical devices.The OPTIMAL consortium consists of three research institutes (JOR, ISE, ILC), one university (UPR), member of the Italian Photonics Association, three Small Medium Enterprises (MRT, DPX, HYP), two big industries, leaders in their corresponding market (SDA and BCD).

MiE_25-27_RP03_PastCallTopics(main)
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)
MiE_25-27_RP05: The next level of circular economy through scalable, highly productive and zero-defect re-manufacturing technologies
Result items:

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will allow for “first time right” fabrication of the required structures, lower consumption of resources, waste reduction, lower CO2 emissions, increase of productivity, and cost reduction. 

MiE_25-27_RP07: Solutions for energy-efficiency for realising net-zero discrete manufacturing processes and value chains
Result items:

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will allow for “first time right” fabrication of the required structures, lower consumption of resources, waste reduction, lower CO2 emissions, increase of productivity, and cost reduction. 

MiE_25-27_RP08: Quick response service deployment for maintaining optimal manufacturing operations using trusted AI and digital twins
Result items:

The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.

MiE_25-27_RP09: Life-cycle management of manufacturing solutions and associated services for flexible, productive and sustainable manufacturing industry
Result items:

By accelerating and upscaling the structuring process, the OPTIMAL project will increase the process efficiency and yield, which will allow for “first time right” fabrication of the required structures, lower consumption of resources, waste reduction, lower CO2 emissions, increase of productivity, and cost reduction. 

MiE_25-27_RP10: Data spaces and cloud/edge solutions for responsive and robust manufacturing
Result items:

The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.

MiE_25-27_RP11: Digitally enabled compliance and integration of innovative manufacturing solutions
Result items:

The OPTIMAL project uses self-learning algorithms to optimize the virtual photomask as well as integrates methods for an inline control of the laser patterning.

MiE_25-27_RP14: Digitally enabled upskilling, qualification and job transformation
Result items:
Specific Objective 1: Excellent, responsive and smart factories & supply chains
R&I Objective 1.3: Zero-defect and zero-downtime high-precision manufacturing, including predictive quality and non-destructive inspection methods
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)
R&I Objective 1.5: Advanced Manufacturing processes for smart and complex products
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)
R&I Objective 1.6: Manufacturing for miniaturisation and functional Integration
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)
Horizon Europe
HORIZON.2 Global Challenges and European Industrial Competitiveness
HORIZON.2.4 Digital, Industry and Space
HORIZON.2.4.1 Manufacturing Technologies
HORIZON-CL4-2021-TWIN-TRANSITION-01
HORIZON-CL4-2021-TWIN-TRANSITION-01-03: Laser-based technologies for green manufacturing (Photonics - Made in Europe Partnerships) (RIA)