Integrated scattered light for surface metrology

Summary
The new OS800 scatterometer opens up a new world of surface metrology. It allows complete functional surfaces to be evaluated directly in the machine environment with regard to their contact mechanical properties. Thus, function-relevant tool or machine changes can be observed directly in the manufacturing process and readjusted if necessary. Fast Ethernet connections allow the data to be processed almost in real time and used for process automation.
A new class of surface parameters enables direct reference to the surface function, which was not yet possible with topography measurements. Thus, machine elements can be designed directly for higher efficiency and the necessary manufacturing processes can be optimized in a targeted manner. The necessary standards are calibrated according to ISO17025 and the procedure itself is normatively described in a VDA recommendation.
The new OS800 scattered light sensor features high sensitivity to surface changes combined with high robustness. Its fast Ethernet connection enables roughness measurements with up to 8kHz. A connection to the machine control via Profibus, Profinet or Ethercat is possible. The software is database-driven and allows statistical process evaluation.
• -Measurement speed: 8kHz
• IP65
• Spot size 0.03/0.3/0.9 and NEW 7mm
• Roughness on high polished surfaces below 1nm in Ra dimension
• High frequency(k>500) waviness amplitude <5nm
• Insensitive to vibrations
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More information & hyperlinks
Web resources: https://www.optosurf.de/en/home/
Country: DE
Address: OPTOSURF GmbH, Nobelstrasse 9-13, Ettlingen 76725