• Results
  • Microparts inline metrology tool

Microparts inline metrology tool

Microparts inline metrology tool
Summary
Development of a specific metrology tool to make measurements on parts with micro shapes. Technology used is different from the previuos one that is used for nano features.
Results type(s)
Unfold all
/
Fold all
More information & hyperlinks
Country: GERMANY
Address: Zeiss - Oberkochen
Geographical location(s)