Advanced Wafer Container Contamination Control Methods and Strategies in Power Device Manufacturing

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Authors: Markus Pfeffer, C. Zaengle, A.J. Bauer, G. Schneider, P. Franze

Journal title: 2018 International Symposium on Semiconductor Manufacturing (ISSM)

Journal publisher: IEEE

Published year: 2018

Published pages: 1-4

DOI identifier: 10.1109/issm.2018.8651151

ISBN:978-1-5386-6268-7