Enhancing Flexibility and Robustness of Semiconductor Production by Using Autonomous Modular Services

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Authors: Prof. Dr. Sophia Keil; Dr. Germar Schneider; Mathias Kuttig; Prof. Dr. Arthur Deutschländer; Arnold Lange; Harald Heinrich

Journal title: 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal publisher: The Institute of Electrical and Electronics Engineers, Incorporated (the “IEEE”)

Published year: 2018