Deep learning for virtual metrology: Modeling with optical emission spectroscopy data

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: Matteo Terzi, Chiara Masiero, Alessandro Beghi, Marco Maggipinto, Gian Antonio Susto

Journal title: 2017 IEEE 3rd International Forum on Research and Technologies for Society and Industry (RTSI)

Journal publisher: IEEE

Published year: 2017

Published pages: 1-6

DOI identifier: 10.1109/RTSI.2017.8065905

ISBN:978-1-5386-3906-1