A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles

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Authors: Sean McLoone, Adrian Johnston, Gian Antonio Susto

Journal title: IEEE Transactions on Automation Science and Engineering

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2018

Published pages: 1-12

DOI identifier: 10.1109/TASE.2017.2786213

ISSN:1545-5955