A dynamic sampling strategy based on confidence level of virtual metrology predictions

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Authors: Gian Antonio Susto

Journal title: 2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

Journal publisher: IEEE

Published year: 2017

Published pages: 78-83

DOI identifier: 10.1109/ASMC.2017.7969203

ISBN:978-1-5090-5448-0