Multi-sensor and closed-loop control of component and assembly processes for zero-defect manufacturing of photonics

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Authors: Erik Beckert, Nikos Kyriakoulis, Jovana Milenkovic, Vassilis Tsolekas, Andreas Mantelos, Apostolos Chondronasios

Journal title: Smart Photonic and Optoelectronic Integrated Circuits XXII

Journal publisher: SPIE

Published year: 2020

Published pages: 12

DOI identifier: 10.1117/12.2542060

ISBN:9781510633322

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