Project: QU4LITY
Updated at: 01-02-2024
Project: OPTIMAL
Updated at: 30-01-2024
The OPTIMAL project will integrate for the first-time different laser lithography technologies, quality monitoring systems and processes in one platform for the development of structures with high depth, dimensions in the range from 100 nm to sub-mm, 2D&3D shape on flat surface, combining parallel & serial patterning, no need for external treatments on samples, increased speed and large area.
Quality- Fall Off Rate, from 95% (as is) to 98,5% (to be)