EFFRA Innovation Portal

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Project: MADEin4

Updated at: 29-04-2024

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D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Project: MADEin4

Updated at: 29-04-2024

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Penalised robust estimators for sparse and high-dimensional linear models

Project: MADEin4

Updated at: 29-04-2024

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Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Project: MADEin4

Updated at: 29-04-2024

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Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Project: MADEin4

Updated at: 29-04-2024

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Penalized wavelet estimation and robust denoising for irregular spaced data

Project: MADEin4

Updated at: 29-04-2024

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PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Project: MADEin4

Updated at: 29-04-2024

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Increase of wafer inspection tool throughput with computational imaging

Project: MADEin4

Updated at: 29-04-2024

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Phase retrieval from overexposed PSF: a projection-based approach

Project: MADEin4

Updated at: 29-04-2024

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MFIG - a Mass Filtered Ion Gauge

Project: MADEin4

Updated at: 29-04-2024

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High-NA EUV photoresist metrology using high-throughput scanning probe microscopy

Project: MADEin4

Updated at: 29-04-2024

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Wavelet-based robust estimation and variable selection in nonparametric additive models

Project: MADEin4

Updated at: 29-04-2024

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Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition

Project: MADEin4

Updated at: 29-04-2024

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Analysis of Line-Edge Roughness Using EUV Scatterometry

Project: MADEin4

Updated at: 29-04-2024

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Pulsed Laser Deposition of SWCNTs on Carbon Fibres: Effect of Deposition Temperature

Project: MADEin4

Updated at: 29-04-2024

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Similarity-based Brownian Motion Approach for Remaining Useful Life Prediction

Project: MADEin4

Updated at: 29-04-2024

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Data fusion by artificial neural network for hybrid metrology development

Project: MADEin4

Updated at: 29-04-2024

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Multi-branch neural network for hybrid metrology improvement

Project: MADEin4

Updated at: 29-04-2024

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TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources

Project: MADEin4

Updated at: 29-04-2024

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Inter-diffusion, melting and reaction interplay in Ni/4H-SiC under excimer laser annealing

Project: MADEin4

Updated at: 29-04-2024

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TXRF/GIXRF high precision laboratory setup with high flux monochromatic source

Project: MADEin4

Updated at: 29-04-2024

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Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation

Project: MADEin4

Updated at: 29-04-2024

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Closed-Loop Active Model Diagnosis Using Bhattacharyya Coefficient: Application to Automated Visual Inspection.

Project: MADEin4

Updated at: 29-04-2024

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Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Project: MADEin4

Updated at: 29-04-2024

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Electrodeposition of NiSn-rGO Composite Coatings from Deep Eutectic Solvents and Their Physicochemical Characterization

Project: MADEin4

Updated at: 29-04-2024

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LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes

Project: MADEin4

Updated at: 29-04-2024

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Study of plasma etching impact on chemoepitaxy directed self-assembly

Project: MADEin4

Updated at: 29-04-2024

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Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

Project: MADEin4

Updated at: 29-04-2024

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D6.3.4: SEMICON Europa 2021 Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

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Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing

Project: MADEin4

Updated at: 29-04-2024

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A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Penalised robust estimators for sparse and high-dimensional linear models

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Penalized wavelet estimation and robust denoising for irregular spaced data

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Increase of wafer inspection tool throughput with computational imaging

Phase retrieval from overexposed PSF: a projection-based approach

MFIG - a Mass Filtered Ion Gauge

High-NA EUV photoresist metrology using high-throughput scanning probe microscopy

Wavelet-based robust estimation and variable selection in nonparametric additive models

Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition

Analysis of Line-Edge Roughness Using EUV Scatterometry

Pulsed Laser Deposition of SWCNTs on Carbon Fibres: Effect of Deposition Temperature

Similarity-based Brownian Motion Approach for Remaining Useful Life Prediction

Data fusion by artificial neural network for hybrid metrology development

Multi-branch neural network for hybrid metrology improvement

TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources

Inter-diffusion, melting and reaction interplay in Ni/4H-SiC under excimer laser annealing

TXRF/GIXRF high precision laboratory setup with high flux monochromatic source

Simulations of the Ultra-Fast Kinetics in Ni-Si-C Ternary Systems under Laser Irradiation

Closed-Loop Active Model Diagnosis Using Bhattacharyya Coefficient: Application to Automated Visual Inspection.

Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Electrodeposition of NiSn-rGO Composite Coatings from Deep Eutectic Solvents and Their Physicochemical Characterization

LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes

Study of plasma etching impact on chemoepitaxy directed self-assembly

Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

D6.3.4: SEMICON Europa 2021 Dissemination Factsheets

Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing