EFFRA Innovation Portal

Periodic Reporting for period 3 - MADEin4 (Metrology Advances for Digitized ECS industry 4.0)

Project: MADEin4

Updated at: 29-04-2024

Closed-Loop Active Model Diagnosis Using Bhattacharyya Coefficient: Application to Automated Visual Inspection.

Project: MADEin4

Updated at: 29-04-2024

Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Project: MADEin4

Updated at: 29-04-2024

Electrodeposition of NiSn-rGO Composite Coatings from Deep Eutectic Solvents and Their Physicochemical Characterization

Project: MADEin4

Updated at: 29-04-2024

LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes

Project: MADEin4

Updated at: 29-04-2024

Data fusion by artificial neural network for hybrid metrology development

Project: MADEin4

Updated at: 29-04-2024

Multi-branch neural network for hybrid metrology improvement

Project: MADEin4

Updated at: 29-04-2024

MFIG — A Mass Filtered Ion Gauge

Project: MADEin4

Updated at: 29-04-2024

An optical system and image processing tool for predicting PIN malfunctioning in growth Chambers of semiconductors

Project: MADEin4

Updated at: 29-04-2024

Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing

Project: MADEin4

Updated at: 29-04-2024

Robust Classification of Intramuscular EMG Signals to Aid the Diagnosis of Neuromuscular Disorders

Project: MADEin4

Updated at: 29-04-2024

Closed-loop active object recognition with constrained illumination power

Project: MADEin4

Updated at: 29-04-2024

Particle detection using closed-loop active model diagnosis

Project: MADEin4

Updated at: 29-04-2024

Predictive virtual processes, metrology and maintenance in power device manufacturing

Project: MADEin4

Updated at: 29-04-2024

High Throughput Scanning Probe Metrology for High-NA EUV photoresist profiling

Project: MADEin4

Updated at: 29-04-2024

Study of plasma etching impact on chemoepitaxy directed self-assembly

Project: MADEin4

Updated at: 29-04-2024

Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

Project: MADEin4

Updated at: 29-04-2024

D6.3.4: SEMICON Europa 2021 Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES

Project: MADEin4

Updated at: 29-04-2024

Predictive discarding for sustainable Industry 5.0

Project: MADEin4

Updated at: 29-04-2024

Phase Retrieval from Overexposed PSF with Projection Methods

Project: MADEin4

Updated at: 29-04-2024

A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluoresc...

Project: MADEin4

Updated at: 29-04-2024

Convex combination of alternating projection and Douglas–Rachford operators for phase retrieval

Project: MADEin4

Updated at: 29-04-2024

TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources for archeometric applications

Project: MADEin4

Updated at: 29-04-2024

A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

Project: MADEin4

Updated at: 29-04-2024

Health Indicator for Batch Processes Based on SP-LASSO

Project: MADEin4

Updated at: 29-04-2024

Atomistic Simulation of Ultra-Fast Annealing Processes (Invited Talk)

Project: MADEin4

Updated at: 29-04-2024

Block copolymer line roughness measurement via PSD: application to fingerprint samples

Project: MADEin4

Updated at: 29-04-2024

APPARATUS AND METHOD FOR DEFECT DETECTION IN WORK PIECES

Project: MADEin4

Updated at: 29-04-2024

Environmental screening of existing processes reports

Project: ToMax

Updated at: 29-04-2024

Resources

Selected filters:

Periodic Reporting for period 3 - MADEin4 (Metrology Advances for Digitized ECS industry 4.0)

Closed-Loop Active Model Diagnosis Using Bhattacharyya Coefficient: Application to Automated Visual Inspection.

Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Electrodeposition of NiSn-rGO Composite Coatings from Deep Eutectic Solvents and Their Physicochemical Characterization

LASSO-based Health Indicator Extraction Method for Semiconductor Manufacturing Processes

Data fusion by artificial neural network for hybrid metrology development

Multi-branch neural network for hybrid metrology improvement

MFIG — A Mass Filtered Ion Gauge

An optical system and image processing tool for predicting PIN malfunctioning in growth Chambers of semiconductors

Structural and electrical characterization of Ni-based ohmic contacts on 4H-SiC formed by solid-state laser annealing

Robust Classification of Intramuscular EMG Signals to Aid the Diagnosis of Neuromuscular Disorders

Closed-loop active object recognition with constrained illumination power

Particle detection using closed-loop active model diagnosis

Predictive virtual processes, metrology and maintenance in power device manufacturing

High Throughput Scanning Probe Metrology for High-NA EUV photoresist profiling

Study of plasma etching impact on chemoepitaxy directed self-assembly

Establishing a sidewall image transfer chemo-epitaxial DSA process using 193 nm immersion lithography

D6.3.4: SEMICON Europa 2021 Dissemination Factsheets

APPARATUS, METHOD AND COMPUTER PROGRAM PRODUCT FOR DEFECT DETECTION IN WORK PIECES

Predictive discarding for sustainable Industry 5.0

Phase Retrieval from Overexposed PSF with Projection Methods

A semi-analytical approach for the characterization of ordered 3D nano structures using grazing-incidence X-ray fluoresc...

Convex combination of alternating projection and Douglas–Rachford operators for phase retrieval

TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources for archeometric applications

A Comparative Evaluation of Deep Learning Anomaly Detection Techniques on Semiconductor Multivariate Time Series Data

Health Indicator for Batch Processes Based on SP-LASSO

Atomistic Simulation of Ultra-Fast Annealing Processes (Invited Talk)

Block copolymer line roughness measurement via PSD: application to fingerprint samples

APPARATUS AND METHOD FOR DEFECT DETECTION IN WORK PIECES

Environmental screening of existing processes reports