EFFRA Innovation Portal

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Project: MADEin4

Updated at: 29-04-2024

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1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Project: MADEin4

Updated at: 29-04-2024

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Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

Project: MADEin4

Updated at: 29-04-2024

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Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

Project: MADEin4

Updated at: 29-04-2024

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D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

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Projection methods for high numerical aperture phase retrieval

Project: MADEin4

Updated at: 29-04-2024

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A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Project: MADEin4

Updated at: 29-04-2024

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Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Project: MADEin4

Updated at: 29-04-2024

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Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

Project: MADEin4

Updated at: 29-04-2024

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COMBINED TRANSMITTED AND REFLECTED LIGHT IMAGING OF INTERNAL CRACKS IN SEMICONDUCTOR DEVICES

Project: MADEin4

Updated at: 29-04-2024

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SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES

Project: MADEin4

Updated at: 29-04-2024

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Penalised robust estimators for sparse and high-dimensional linear models

Project: MADEin4

Updated at: 29-04-2024

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Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Project: MADEin4

Updated at: 29-04-2024

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Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Project: MADEin4

Updated at: 29-04-2024

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Penalized wavelet estimation and robust denoising for irregular spaced data

Project: MADEin4

Updated at: 29-04-2024

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PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Project: MADEin4

Updated at: 29-04-2024

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Increase of wafer inspection tool throughput with computational imaging

Project: MADEin4

Updated at: 29-04-2024

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Phase retrieval from overexposed PSF: a projection-based approach

Project: MADEin4

Updated at: 29-04-2024

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D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Project: MADEin4

Updated at: 29-04-2024

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Wavelet-based robust estimation and variable selection in nonparametric additive models

Project: MADEin4

Updated at: 29-04-2024

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Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition

Project: MADEin4

Updated at: 29-04-2024

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MFIG - a Mass Filtered Ion Gauge

Project: MADEin4

Updated at: 29-04-2024

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High-NA EUV photoresist metrology using high-throughput scanning probe microscopy

Project: MADEin4

Updated at: 29-04-2024

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Analysis of Line-Edge Roughness Using EUV Scatterometry

Project: MADEin4

Updated at: 29-04-2024

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Pulsed Laser Deposition of SWCNTs on Carbon Fibres: Effect of Deposition Temperature

Project: MADEin4

Updated at: 29-04-2024

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Similarity-based Brownian Motion Approach for Remaining Useful Life Prediction

Project: MADEin4

Updated at: 29-04-2024

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Prediction of Yield in semiconductor production from defects optically detected on the Wafers

Project: MADEin4

Updated at: 29-04-2024

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High-Speed Tapping Mode AFM Utilizing Recovery of Tip-Sample Interaction

Project: MADEin4

Updated at: 29-04-2024

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TXRF/GIXRF high precision laboratory setup with high flux monochromatic source

Project: MADEin4

Updated at: 29-04-2024

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TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources

Project: MADEin4

Updated at: 29-04-2024

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Resources

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Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Projection methods for high numerical aperture phase retrieval

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

COMBINED TRANSMITTED AND REFLECTED LIGHT IMAGING OF INTERNAL CRACKS IN SEMICONDUCTOR DEVICES

SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES

Penalised robust estimators for sparse and high-dimensional linear models

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Penalized wavelet estimation and robust denoising for irregular spaced data

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Increase of wafer inspection tool throughput with computational imaging

Phase retrieval from overexposed PSF: a projection-based approach

D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Wavelet-based robust estimation and variable selection in nonparametric additive models

Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition

MFIG - a Mass Filtered Ion Gauge

High-NA EUV photoresist metrology using high-throughput scanning probe microscopy

Analysis of Line-Edge Roughness Using EUV Scatterometry

Pulsed Laser Deposition of SWCNTs on Carbon Fibres: Effect of Deposition Temperature

Similarity-based Brownian Motion Approach for Remaining Useful Life Prediction

Prediction of Yield in semiconductor production from defects optically detected on the Wafers

High-Speed Tapping Mode AFM Utilizing Recovery of Tip-Sample Interaction

TXRF/GIXRF high precision laboratory setup with high flux monochromatic source

TXRF/GIRXF high precision laboratory setup with high flux monochromatic sources