EFFRA Innovation Portal

Combining Approaches of Brownian Motion and Similarity Principle to Improve the Remaining Useful Life Prediction

Project: MADEin4

Updated at: 29-04-2024

Semiconductor Multivariate Time-Series Anomaly Classification Based on Machine Learning Ensemble Techniques

Project: MADEin4

Updated at: 29-04-2024

D6.3.6: SEMI Technology Unites Global Summit Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control

Project: MADEin4

Updated at: 29-04-2024

Multiscale simulations of plasma etching in silicon carbide structures

Project: MADEin4

Updated at: 29-04-2024

Industry4.0 Productivity Improvement in Major EU Fabs

Project: MADEin4

Updated at: 29-04-2024

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Project: MADEin4

Updated at: 29-04-2024

Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

Project: MADEin4

Updated at: 29-04-2024

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Project: MADEin4

Updated at: 29-04-2024

Uncertainties in the reconstruction of nanostructures in {EUV} scatterometry and grazing incidence small-angle X-ray sca...

Project: MADEin4

Updated at: 29-04-2024

Multi party privacy preserving machine learning for process control

Project: MADEin4

Updated at: 29-04-2024

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

Project: MADEin4

Updated at: 29-04-2024

SEMICON Europa 2019 Dissemination Factsheets - 1

Project: MADEin4

Updated at: 29-04-2024

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Project: MADEin4

Updated at: 29-04-2024

Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Project: MADEin4

Updated at: 29-04-2024

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

Project: MADEin4

Updated at: 29-04-2024

Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

Project: MADEin4

Updated at: 29-04-2024

D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Project: MADEin4

Updated at: 29-04-2024

Projection methods for high numerical aperture phase retrieval

Project: MADEin4

Updated at: 29-04-2024

COMBINED TRANSMITTED AND REFLECTED LIGHT IMAGING OF INTERNAL CRACKS IN SEMICONDUCTOR DEVICES

Project: MADEin4

Updated at: 29-04-2024

SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES

Project: MADEin4

Updated at: 29-04-2024

D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Project: MADEin4

Updated at: 29-04-2024

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

Project: MADEin4

Updated at: 29-04-2024

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Project: MADEin4

Updated at: 29-04-2024

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Project: MADEin4

Updated at: 29-04-2024

Penalized wavelet estimation and robust denoising for irregular spaced data

Project: MADEin4

Updated at: 29-04-2024

Penalised robust estimators for sparse and high-dimensional linear models

Project: MADEin4

Updated at: 29-04-2024

Phase retrieval from overexposed PSF: a projection-based approach

Project: MADEin4

Updated at: 29-04-2024

Increase of wafer inspection tool throughput with computational imaging

Project: MADEin4

Updated at: 29-04-2024

Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition

Project: MADEin4

Updated at: 29-04-2024

Resources

Selected filters:

Combining Approaches of Brownian Motion and Similarity Principle to Improve the Remaining Useful Life Prediction

Semiconductor Multivariate Time-Series Anomaly Classification Based on Machine Learning Ensemble Techniques

D6.3.6: SEMI Technology Unites Global Summit Dissemination Factsheets

Chasing Abnormalities on Time Series for Predictive Maintenance and Advanced Process Control

Multiscale simulations of plasma etching in silicon carbide structures

Industry4.0 Productivity Improvement in Major EU Fabs

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Ensemble Machine Learning Algorithms for Anomaly Detection in Multivariate Time-Series

1D ResNet for Fault Detection and Classification on Sensor Data in Semiconductor Manufacturing

Uncertainties in the reconstruction of nanostructures in {EUV} scatterometry and grazing incidence small-angle X-ray sca...

Multi party privacy preserving machine learning for process control

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

SEMICON Europa 2019 Dissemination Factsheets - 1

A fusion of electronic design, process and metrology in semiconductor manufacturing for improved process optimization an...

Surface Topography of Si/TiO2 Stacked Layers on Silicon Substrate Deposited by KrF Excimer Laser Ablation

Selective plasma etching of silicon-containing high chi block copolymer for directed self-assembly (DSA) application

Modelling Ion Production inside an Electron Impact Ionizer for High-Vacuum Gas Analysis

D6.3.3: SEMI Technology Unites Global Summit Dissemination Factsheets

Projection methods for high numerical aperture phase retrieval

COMBINED TRANSMITTED AND REFLECTED LIGHT IMAGING OF INTERNAL CRACKS IN SEMICONDUCTOR DEVICES

SYSTEM AND METHOD FOR INSPECTION AND METROLOGY OF FOUR SIDES OF SEMICONDUCTOR DEVICES

D6.3.5: ENBIS 2021 data management / machine learning Workshop Dissemination Factsheet

Predictive discarding of wafers based on power leakage predictions from single layer misalignment data

PROLIFIC: A Fast and Robust Profile-Likelihood-Based Muscle Onset Detection in Electromyogram Using Discrete Fibonacci S...

Flexible, boundary adapted, nonparametric methods for the estimation of univariate piecewise-smooth functions

Penalized wavelet estimation and robust denoising for irregular spaced data

Penalised robust estimators for sparse and high-dimensional linear models

Phase retrieval from overexposed PSF: a projection-based approach

Increase of wafer inspection tool throughput with computational imaging

Virtual Metrology to Eliminate Test Wafers Measurements on Copper Electroplating Deposition