CITCOM | A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components
01-10-2017
-31-12-2020
Organisation aixACCT Systems GmbH
Periodic Reporting for period 2 - CITCOM (A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components) Result title Periodic Reporting for period 2 - CITCOM (A Complimentary Inspection Technique based on Computer Tomography and Plenoptic Camera for MEMS Components) Result description The term micro-electro-mechanical systems (MEMS) was traditionally used for micro-fabricated devices that converted electrical signals in movement (micro-actuators) or movement into electronic signals.